Assignee
FROSIEN JüRGEN
DE·3 granted patents·28 citations·filing 2011–2013
Technology mixH01J3
Top patents by PatentIndex Score
3 records- 0194US8785879B1Electron beam wafer inspection system and method of operation thereofFROSIEN JüRGEN·Filed 2013·Granted Jul 22, 2014·21 cites·20 claims
- 0281US9305740B2Charged particle beam system and method of operating thereofFROSIEN JüRGEN·Filed 2013·Granted Apr 5, 2016·5 cites·16 claims
- 0370US8866102B2Electron beam device with tilting and dispersion compensation, and method of operating sameFROSIEN JüRGEN·Filed 2011·Granted Oct 21, 2014·2 cites·21 claims
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