Assignee
FSI CORP
US·16 granted patents·1,507 citations·filing 1977–1988
Top patents by PatentIndex Score
16 records- 0198US4132567AApparatus for and method of cleaning and removing static charges from substratesFSI CORP·Filed 1977·Granted Jan 2, 1979·202 cites·6 claims
- 0296US4749440AGaseous process and apparatus for removing films from substratesFSI CORP·Filed 1987·Granted Jun 7, 1988·633 cites·59 claims
- 0394US4197000APositive developing method and apparatusFSI CORP·Filed 1978·Granted Apr 8, 1980·104 cites·19 claims
- 0493US4699298ABung connectionFSI CORP·Filed 1985·Granted Oct 13, 1987·131 cites·2 claims
- 0593US4286541AApplying photoresist onto silicon wafersFSI CORP·Filed 1979·Granted Sep 1, 1981·77 cites·3 claims
- 0684US4609575AMethod of apparatus for applying chemicals to substrates in an acid processing systemFSI CORP·Filed 1984·Granted Sep 2, 1986·61 cites·12 claims
- 0780US4682615ARinsing in acid processing of substratesFSI CORP·Filed 1984·Granted Jul 28, 1987·60 cites·8 claims
- 0879US4816081AApparatus and process for static drying of substratesFSI CORP·Filed 1987·Granted Mar 28, 1989·70 cites·23 claims
- 0974US4664133AWafer processing machineFSI CORP·Filed 1986·Granted May 12, 1987·53 cites·8 claims
- 1062US4682614AWafer processing machineFSI CORP·Filed 1985·Granted Jul 28, 1987·34 cites·12 claims
- 1156US4801335ARinsing in acid processing of substratesFSI CORP·Filed 1986·Granted Jan 31, 1989·26 cites·6 claims
- 1252US4691722ABowl for liquid spray processing machineFSI CORP·Filed 1984·Granted Sep 8, 1987·19 cites·6 claims
- 1346US4694852AFlow regulating valve for controlling the flow of corrosive fluidsFSI CORP·Filed 1986·Granted Sep 22, 1987·12 cites·7 claims
- 1445US4595222ACarrier handleFSI CORP·Filed 1984·Granted Jun 17, 1986·15 cites·2 claims
- 1529US4815630AFluid tight cover sealFSI CORP·Filed 1988·Granted Mar 28, 1989·7 cites·19 claims
- 1628USD286081SCombined high intensity light and holder for silicon wafers or similar articlesFSI CORP·Filed 1984·Granted Oct 7, 1986·3 cites·1 claims
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