Assignee
FSI INT
US·7 granted patents·621 citations·filing 1994–1997
Top patents by PatentIndex Score
7 records- 0192US5580421AApparatus for surface conditioningFSI INT·Filed 1994·Granted Dec 3, 1996·250 cites·36 claims
- 0290US5716495ACleaning methodFSI INT·Filed 1996·Granted Feb 10, 1998·120 cites·38 claims
- 0388US5534107AUV-enhanced dry stripping of silicon nitride filmsFSI INT·Filed 1994·Granted Jul 9, 1996·114 cites·35 claims
- 0473US5782986AProcess for metals removal using beta-diketone or beta-ketoimine ligand forming compoundsFSI INT·Filed 1996·Granted Jul 21, 1998·44 cites·24 claims
- 0566US6099272APeristaltic pump with flow controlFSI INT·Filed 1997·Granted Aug 8, 2000·27 cites·19 claims
- 0662US5635102AHighly selective silicon oxide etching methodFSI INT·Filed 1994·Granted Jun 3, 1997·36 cites·22 claims
- 0762US5567332AMicro-machine manufacturing processFSI INT·Filed 1995·Granted Oct 22, 1996·30 cites·9 claims
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