Assignee

FSI INTERNAT INC

US·2 granted patents·86 citations·filing 1997–1998

Technology mixH10P2 B01F1 C23C1

Top patents by PatentIndex Score

2 records

0176US6235641B1Method and system to control the concentration of dissolved gas in a liquidFSI INTERNAT INC·Filed 1998·Granted May 22, 2001·50 cites·32 claims
0273US6165273AEquipment for UV wafer heating and photochemistryFSI INTERNAT INC·Filed 1997·Granted Dec 26, 2000·36 cites·18 claims

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