Assignee
FTS CORP
JP·3 granted patents·1 pending application·20 citations·filing 2001–2005
Top patents by PatentIndex Score
4 records- 0173US6881311B2Facing-targets-type sputtering apparatusFTS CORP·Filed 2002·Granted Apr 19, 2005·15 cites·25 claims
- 0258US6911123B2Facing-targets-type sputtering apparatus and methodFTS CORP·Filed 2001·Granted Jun 28, 2005·4 cites·17 claims
- 0349US2007187234A1Facing-targets type sputtering apparatusFTS CORP·Filed 2005·Application pending·0 cites
- 0447US7135097B2Box-shaped facing-targets sputtering apparatus and method for producing compound thin filmFTS CORP·Filed 2003·Granted Nov 14, 2006·1 cites·22 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →