Assignee
FUJIKIN KK
JP·378 granted patents·78 pending applications·4,569 citations·filing 1991–2025
Top patents by PatentIndex Score
456 records- 0197US6060691ADevice for heating fluid controllerFUJIKIN KK·Filed 1998·Granted May 9, 2000·593 cites·5 claims
- 0297US5769110AFluid control apparatusFUJIKIN KK·Filed 1996·Granted Jun 23, 1998·85 cites·2 claims
- 0396US11427911B2Valve device, fluid control device and semiconductor manufacturing apparatus using the valve deviceFUJIKIN KK·Filed 2018·Granted Aug 30, 2022·9 cites·5 claims
- 0496US5816285APressure type flow rate control apparatusFUJIKIN KK·Filed 1997·Granted Oct 6, 1998·139 cites·6 claims
- 0594US11873916B2Fluid control device, fluid supply system, and fluid supply methodFUJIKIN KK·Filed 2021·Granted Jan 16, 2024·2 cites·10 claims
- 0694US11506294B2Valve device, method for replacing valve body unit of valve device, and valve device assembly methodFUJIKIN KK·Filed 2021·Granted Nov 22, 2022·4 cites·9 claims
- 0794US10648572B2Valve with built-in orifice, and pressure-type flow rate control deviceFUJIKIN KK·Filed 2017·Granted May 12, 2020·7 cites·11 claims
- 0894US9870006B2Pressure type flow control system with flow monitoringFUJIKIN KK·Filed 2016·Granted Jan 16, 2018·5 cites·4 claims
- 0994US9841770B2Pressure-type flow control device and method for preventing overshooting at start of flow control performed by said deviceFUJIKIN KK·Filed 2015·Granted Dec 12, 2017·10 cites·13 claims
- 1094US9494947B2Pressure type flow control system with flow monitoringFUJIKIN KK·Filed 2013·Granted Nov 15, 2016·15 cites·6 claims
- 1194US6422264B2Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatusFUJIKIN KK·Filed 2000·Granted Jul 23, 2002·64 cites·5 claims
- 1293US11226043B2Ball valveFUJIKIN KK·Filed 2020·Granted Jan 18, 2022·3 cites·8 claims
- 1393US10969259B2Flow rate control device, method of calibrating flow rate of flow rate control device, flow rate measuring device, and method of measuring flow rate using flow rate measuring deviceFUJIKIN KK·Filed 2017·Granted Apr 6, 2021·6 cites·8 claims
- 1493US9625047B2Flow control valve for flow controllerFUJIKIN KK·Filed 2014·Granted Apr 18, 2017·14 cites·14 claims
- 1593US8047510B2Evaporation supply apparatus for raw material and automatic pressure regulating device used therewithFUJIKIN KK·Filed 2007·Granted Nov 1, 2011·17 cites·8 claims
- 1692US9507352B2Variable orifice type pressure-controlled flow controllerFUJIKIN KK·Filed 2013·Granted Nov 29, 2016·16 cites·11 claims
- 1792US9471065B2Integrated type gas supplying apparatusFUJIKIN KK·Filed 2013·Granted Oct 18, 2016·15 cites·30 claims
- 1892US5669408APressure type flow rate control apparatusFUJIKIN KK·Filed 1996·Granted Sep 23, 1997·130 cites·5 claims
- 1991US10132415B2Fluid controllerFUJIKIN KK·Filed 2015·Granted Nov 20, 2018·7 cites·3 claims
- 2091US6871803B1Valve with an integral orificeFUJIKIN KK·Filed 2000·Granted Mar 29, 2005·61 cites·15 claims
- 2191US6820632B2Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatusFUJIKIN KK·Filed 2002·Granted Nov 23, 2004·39 cites·3 claims
- 2291US6302130B1Method and apparatus for detection of orifice clogging in pressure-type flow rate controllersFUJIKIN KK·Filed 1999·Granted Oct 16, 2001·77 cites·10 claims
- 2391US6273139B1Fluid control apparatusFUJIKIN KK·Filed 1998·Granted Aug 14, 2001·70 cites·5 claims
- 2490US11732818B2Electromagnetic valve, valve device, fluid control device, and electromagnetic valve replacement methodFUJIKIN KK·Filed 2021·Granted Aug 22, 2023·2 cites·7 claims
- 2590US11231026B2Valve deviceFUJIKIN KK·Filed 2018·Granted Jan 25, 2022·5 cites·12 claims
- 2690US10895329B2Fluid control system, base block used for same, and method for manufacturing fluid control systemFUJIKIN KK·Filed 2017·Granted Jan 19, 2021·9 cites·13 claims
- 2790US9850920B2Fluid control apparatusFUJIKIN KK·Filed 2013·Granted Dec 26, 2017·12 cites·7 claims
- 2890US6152168APressure-type flow rate control apparatusFUJIKIN KK·Filed 1998·Granted Nov 28, 2000·112 cites·15 claims
- 2989US11359730B2Valve deviceFUJIKIN KK·Filed 2021·Granted Jun 14, 2022·2 cites·2 claims
- 3089US9010369B2Flow rate range variable type flow rate control apparatusFUJIKIN KK·Filed 2013·Granted Apr 21, 2015·8 cites·3 claims
- 3189US5791369APressure type flow rate control apparatusFUJIKIN KK·Filed 1997·Granted Aug 11, 1998·94 cites·6 claims
- 3288US11976356B2Vaporized feed deviceFUJIKIN KK·Filed 2020·Granted May 7, 2024·2 cites·7 claims
- 3388US11402029B2Valve device, fluid control system, fluid control method, semiconductor manufacturing system, and semiconductor manufacturing methodFUJIKIN KK·Filed 2019·Granted Aug 2, 2022·5 cites·13 claims
- 3488US11306830B2Valve deviceFUJIKIN KK·Filed 2019·Granted Apr 19, 2022·5 cites·8 claims
- 3588US10883866B2Pressure-based flow rate control device and malfunction detection method thereforFUJIKIN KK·Filed 2016·Granted Jan 5, 2021·4 cites·9 claims
- 3688US9169940B2Purge line changing block joint and fluid control apparatusFUJIKIN KK·Filed 2013·Granted Oct 27, 2015·11 cites·2 claims
- 3788US6289923B1Gas supply system equipped with pressure-type flow rate control unitFUJIKIN KK·Filed 1999·Granted Sep 18, 2001·61 cites·7 claims
- 3887US11054052B2Piezoelectric-element-driven valve and flow rate control deviceFUJIKIN KK·Filed 2017·Granted Jul 6, 2021·4 cites·8 claims
- 3987US10534376B2Gas divided flow supplying apparatus for semiconductor manufacturing equipmentFUJIKIN KK·Filed 2013·Granted Jan 14, 2020·10 cites·9 claims
- 4087US9383758B2Flow rate range variable type flow rate control apparatusFUJIKIN KK·Filed 2015·Granted Jul 5, 2016·4 cites·4 claims
- 4187US9163969B2Flow rate measurement device and flow rate measurement method for flow rate controller for gas supply deviceFUJIKIN KK·Filed 2013·Granted Oct 20, 2015·8 cites·2 claims
- 4287US7152629B2Fluid control deviceFUJIKIN KK·Filed 2003·Granted Dec 26, 2006·33 cites·1 claims
- 4387US6648020B2Fluid control apparatus and gas treatment system comprising sameFUJIKIN KK·Filed 2001·Granted Nov 18, 2003·40 cites·5 claims
- 4486US11098819B2Valve device, flow control method using the same, and semiconductor manufacturing methodFUJIKIN KK·Filed 2017·Granted Aug 24, 2021·4 cites·13 claims
- 4586US10145479B2Diaphragm valveFUJIKIN KK·Filed 2014·Granted Dec 4, 2018·9 cites·3 claims
- 4686US6360762B2Method for feeding gases for use in semiconductor manufacturingFUJIKIN KK·Filed 2001·Granted Mar 26, 2002·33 cites·8 claims
- 4786US5820105ADiaphragm valveFUJIKIN KK·Filed 1996·Granted Oct 13, 1998·52 cites·3 claims
- 4886US5366261APipe joint with a gasket retainerFUJIKIN KK·Filed 1993·Granted Nov 22, 1994·58 cites·4 claims
- 4985US11686671B2Concentration measurement deviceFUJIKIN KK·Filed 2019·Granted Jun 27, 2023·3 cites·4 claims
- 5085US11079774B2Flow rate control deviceFUJIKIN KK·Filed 2018·Granted Aug 3, 2021·5 cites·12 claims
Showing the top 50 of 456 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when FUJIKIN KK files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →