Assignee
FUJIMORI YOSHIHIKO
JP·1 granted patent·2 pending applications·4 citations·filing 2009–2011
Top patents by PatentIndex Score
3 records- 0170US10460998B2Method for inspecting substrate, substrate inspection apparatus, exposure system, and method for producing semiconductor deviceFUJIMORI YOSHIHIKO·Filed 2011·Granted Oct 29, 2019·4 cites·31 claims
- 0239US2010182603A1Surface Inspection DeviceFUJIMORI YOSHIHIKO·Filed 2010·Application pending·0 cites
- 0335US2009316978A1Manufacturing method for inspection deviceFUJIMORI YOSHIHIKO·Filed 2009·Application pending·0 cites
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