Assignee
FUKAZAWA KAZUHIKO
JP·6 granted patents·1 pending application·8 citations·filing 2009–2011
Top patents by PatentIndex Score
7 records- 0183US8334977B2Evaluation device and evaluation methodFUKAZAWA KAZUHIKO·Filed 2011·Granted Dec 18, 2012·4 cites·22 claims
- 0269US8945954B2Inspection method, inspection apparatus, exposure control method, exposure system, and semiconductor deviceFUKAZAWA KAZUHIKO·Filed 2011·Granted Feb 3, 2015·1 cites·8 claims
- 0366US10352875B2Inspection apparatus, inspection method, exposure method, and method for manufacturing semiconductor deviceFUKAZAWA KAZUHIKO·Filed 2011·Granted Jul 16, 2019·2 cites·33 claims
- 0464US9240356B2Surface inspection apparatus, method for inspecting surface, exposure system, and method for producing semiconductor deviceFUKAZAWA KAZUHIKO·Filed 2011·Granted Jan 19, 2016·1 cites·12 claims
- 0551US8441627B2Surface inspection apparatus and surface inspection methodFUKAZAWA KAZUHIKO·Filed 2010·Granted May 14, 2013·0 cites·14 claims
- 0649US8223328B2Surface inspecting apparatus and surface inspecting methodFUKAZAWA KAZUHIKO·Filed 2011·Granted Jul 17, 2012·0 cites·15 claims
- 0748US2009315988A1Observation device, inspection device and inspection methodFUKAZAWA KAZUHIKO·Filed 2009·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when FUKAZAWA KAZUHIKO files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →