Assignee
FUKUOKA TETSUO
JP·4 granted patents·8 citations·filing 2007–2009
Top patents by PatentIndex Score
4 records- 0169US8933376B2Heating device, coating and developing system, heating method and storage mediumFUKUOKA TETSUO·Filed 2008·Granted Jan 13, 2015·3 cites·23 claims
- 0267US8326559B2Substrate processing system, system inspecting method, system inspecting program and recording medium storing the program recorded thereinFUKUOKA TETSUO·Filed 2007·Granted Dec 4, 2012·3 cites·14 claims
- 0364US8217313B2Heating apparatus and heating methodFUKUOKA TETSUO·Filed 2008·Granted Jul 10, 2012·2 cites·6 claims
- 0459US8304020B2Adhesion promoting process, adhesion promoting device, coating and developing system and storage mediumFUKUOKA TETSUO·Filed 2009·Granted Nov 6, 2012·0 cites·6 claims
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