Assignee
FURUKAWA TAIICHI
JP·1 granted patent·2 pending applications·2 citations·filing 2006–2011
Top patents by PatentIndex Score
3 records- 0170US8703401B2Method for forming pattern and developerFURUKAWA TAIICHI·Filed 2011·Granted Apr 22, 2014·2 cites·9 claims
- 0238US2007156003A1Method for producing saturated hydrocarbon compoundFURUKAWA TAIICHI·Filed 2006·Application pending·0 cites
- 0336US2008129970A1Immersion Exposure System, and Recycle Method and Supply Method of Liquid for Immersion ExposureFURUKAWA TAIICHI·Filed 2006·Application pending·0 cites
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