Assignee

FURUMOTO MITSUHIRO

JP·2 granted patents·2 citations·filing 2011–2012

Technology mixG03F2 H01J2 F16F1 G05D1 G06F1 Y10S1

Top patents by PatentIndex Score

2 records

0164US8956143B2Lithography system and lithography methodFURUMOTO MITSUHIRO·Filed 2011·Granted Feb 17, 2015·2 cites·12 claims
0235US8915479B2Anti-vibration apparatusFURUMOTO MITSUHIRO·Filed 2012·Granted Dec 23, 2014·0 cites·8 claims

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