Assignee

GASONICS INC

US·2 granted patents·648 citations·filing 1990–1994

Technology mixC30B1 F22B1 H10P1

Top patents by PatentIndex Score

2 records

0195US5167716AMethod and apparatus for batch processing a semiconductor waferGASONICS INC·Filed 1990·Granted Dec 1, 1992·620 cites·25 claims
0261US5467424AApparatus and method for generating steamGASONICS INC·Filed 1994·Granted Nov 14, 1995·28 cites·35 claims

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