Assignee
GASONICS INTERNAT CORP
US·3 granted patents·287 citations·filing 1999–1999
Top patents by PatentIndex Score
3 records- 0193US6228563B1Method and apparatus for removing post-etch residues and other adherent matricesGASONICS INTERNAT CORP·Filed 1999·Granted May 8, 2001·218 cites·20 claims
- 0266US6183026B1End effectorGASONICS INTERNAT CORP·Filed 1999·Granted Feb 6, 2001·40 cites·33 claims
- 0357US6190103B1Wafer transfer device and methodGASONICS INTERNAT CORP·Filed 1999·Granted Feb 20, 2001·29 cites·59 claims
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