Assignee
GCA CORP TROPEL DIVISION
US·2 granted patents·30 citations·filing 1983–1986
Top patents by PatentIndex Score
2 records- 0150US4790642AIntegrated metrology for microlithographic objective reducing lensGCA CORP TROPEL DIVISION·Filed 1986·Granted Dec 13, 1988·18 cites·36 claims
- 0246US4509858ACompact, linear measurement interferometer with zero abbe errorGCA CORP TROPEL DIVISION·Filed 1983·Granted Apr 9, 1985·12 cites·14 claims
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