Assignee
GEH BERND
US·3 granted patents·8 citations·filing 2005–2012
Technology mixG03F3
Top patents by PatentIndex Score
3 records- 0182US8120748B2Lithographic processing optimization based on hypersampled correlationsGEH BERND·Filed 2007·Granted Feb 21, 2012·8 cites·27 claims
- 0256US9217932B2Projection objective for microlithographyGEH BERND·Filed 2012·Granted Dec 22, 2015·0 cites·10 claims
- 0350US8212988B2Projection objective for microlithographyGEH BERND·Filed 2005·Granted Jul 3, 2012·0 cites·15 claims
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