Assignee
GENITECH INC
KR·4 granted patents·976 citations·filing 2000–2000
Top patents by PatentIndex Score
4 records- 0197US6720262B2Method of forming copper interconnections and thin films using chemical vapor deposition with catalystGENITECH INC·Filed 2000·Granted Apr 13, 2004·335 cites·12 claims
- 0296US6539891B1Chemical deposition reactor and method of forming a thin film using the sameGENITECH INC·Filed 2000·Granted Apr 1, 2003·503 cites·7 claims
- 0394US6645574B1Method of forming a thin filmGENITECH INC·Filed 2000·Granted Nov 11, 2003·104 cites·11 claims
- 0487US6380081B1Method of vaporizing liquid sources and apparatus thereforGENITECH INC·Filed 2000·Granted Apr 30, 2002·34 cites·16 claims
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