Assignee
GLUKHOY YURI
US·6 granted patents·2 pending applications·89 citations·filing 2004–2019
Top patents by PatentIndex Score
8 records- 0196US9484190B2Showerhead-cooler system of a semiconductor-processing chamber for semiconductor wafers of large areaGLUKHOY YURI·Filed 2014·Granted Nov 1, 2016·23 cites·11 claims
- 0292US7967945B2RF antenna assembly for treatment of inner surfaces of tubes with inductively coupled plasmaGLUKHOY YURI·Filed 2008·Granted Jun 28, 2011·48 cites·16 claims
- 0391US9273393B2Torch system for depositing protective coatings on interior walls and recesses present on the flat surface of an objectGLUKHOY YURI·Filed 2014·Granted Mar 1, 2016·6 cites·12 claims
- 0484US10730239B13D printing apparatus using a beam of an atmospheric pressure inductively coupled plasma generatorGLUKHOY YURI·Filed 2019·Granted Aug 4, 2020·7 cites·20 claims
- 0581US9275840B2Method for providing uniform distribution of plasma density in a plasma treatment apparatusGLUKHOY YURI·Filed 2014·Granted Mar 1, 2016·5 cites·8 claims
- 0652US8062470B2Method and apparatus for application of thin coatings from plasma onto inner surfaces of hollow containersGLUKHOY YURI·Filed 2008·Granted Nov 22, 2011·0 cites·10 claims
- 0738US2009284421A1RF antenna assembly having an antenna with transversal magnetic field for generation of inductively coupled plasmaGLUKHOY YURI·Filed 2008·Application pending·0 cites
- 0834US2005258149A1Method and apparatus for manufacture of nanoparticlesGLUKHOY YURI·Filed 2004·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when GLUKHOY YURI files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →