Assignee
GODOT ERWAN
FR·2 granted patents·13 citations·filing 2008–2008
Top patents by PatentIndex Score
2 records- 0177US8898930B2Method for treating a transport support for the conveyance and atmospheric storage of semiconductor substrates, and treatment station for the implementation of such a methodGODOT ERWAN·Filed 2008·Granted Dec 2, 2014·11 cites·18 claims
- 0262US8276432B2Transport pod interfaceGODOT ERWAN·Filed 2008·Granted Oct 2, 2012·2 cites·10 claims
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