Assignee
GOODMAN DANIEL
US·7 granted patents·42 citations·filing 2007–2012
Top patents by PatentIndex Score
7 records- 0193US9421617B2Substrate holderGOODMAN DANIEL·Filed 2012·Granted Aug 23, 2016·20 cites·6 claims
- 0285US8967935B2Substrate loader and unloaderGOODMAN DANIEL·Filed 2011·Granted Mar 3, 2015·6 cites·22 claims
- 0384US8613474B2Substrate loader and unloader having a Bernoulli supportGOODMAN DANIEL·Filed 2011·Granted Dec 24, 2013·5 cites·30 claims
- 0478US8420981B2Apparatus for thermal processing with micro-environmentGOODMAN DANIEL·Filed 2009·Granted Apr 16, 2013·8 cites·44 claims
- 0577US9117856B2Substrate loader and unloader having an air bearing supportGOODMAN DANIEL·Filed 2011·Granted Aug 25, 2015·3 cites·10 claims
- 0650US9147588B2Substrate processing pallet with coolingGOODMAN DANIEL·Filed 2007·Granted Sep 29, 2015·0 cites·27 claims
- 0738US8858755B2Edge bevel removal apparatus and methodGOODMAN DANIEL·Filed 2012·Granted Oct 14, 2014·0 cites·25 claims
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