Assignee
GOTO HARUHIRO HARRY
US·4 granted patents·57 citations·filing 2008–2012
Top patents by PatentIndex Score
4 records- 0192US8193096B2High dose implantation strip (HDIS) in H2 base chemistryGOTO HARUHIRO HARRY·Filed 2008·Granted Jun 5, 2012·16 cites·26 claims
- 0291US8058178B1Photoresist strip method for low-k dielectricsGOTO HARUHIRO HARRY·Filed 2009·Granted Nov 15, 2011·22 cites·11 claims
- 0390US8444869B1Simultaneous front side ash and backside cleanGOTO HARUHIRO HARRY·Filed 2010·Granted May 21, 2013·11 cites·17 claims
- 0489US8641862B2High dose implantation strip (HDIS) in H2 base chemistryGOTO HARUHIRO HARRY·Filed 2012·Granted Feb 4, 2014·8 cites·20 claims
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