Assignee
GRAF MICHAEL
US·2 granted patents·2 pending applications·6 citations·filing 2007–2010
Top patents by PatentIndex Score
4 records- 0175US8173980B2Gas cluster ion beam system with cleaning apparatusGRAF MICHAEL·Filed 2010·Granted May 8, 2012·4 cites·17 claims
- 0263US8338806B2Gas cluster ion beam system with rapid gas switching apparatusGRAF MICHAEL·Filed 2010·Granted Dec 25, 2012·2 cites·29 claims
- 0345US2008256905A1Valve bag placing system and methodGRAF MICHAEL·Filed 2008·Application pending·0 cites
- 0439US2008023654A1Method of reducing transient wafer temperature during implantationGRAF MICHAEL·Filed 2007·Application pending·0 cites
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