Assignee

GRAF MICHAEL A

US·1 granted patent·1 citations·filing 2006–2006

Technology mixH01J1 H01L1 H10P1

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0155US8803110B2Methods for beam current modulation by ion source parameter modulationGRAF MICHAEL A·Filed 2006·Granted Aug 12, 2014·1 cites·13 claims

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