Assignee

GRANNEMAN ERNST H A

NL·2 granted patents·28 citations·filing 2009–2009

Technology mixC23C2 C30B2 H01L2 H10P2

Top patents by PatentIndex Score

2 records

0184US9243330B2Apparatus and method for high-throughput atomic layer depositionGRANNEMAN ERNST H A·Filed 2009·Granted Jan 26, 2016·17 cites·18 claims
0284US9238867B2Apparatus and method for high-throughput atomic layer depositionGRANNEMAN ERNST H A·Filed 2009·Granted Jan 19, 2016·11 cites·16 claims

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