Assignee

GRANNEMAN ERNST HENDRIK AUGUST

NL·1 granted patent·1 pending application·2 citations·filing 2010–2011

Technology mixB65G2 C23C2 H10P2 C03B1 H01L1

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2 records

0162US10837107B2Method and apparatus for contactlessly advancing substratesGRANNEMAN ERNST HENDRIK AUGUST·Filed 2011·Granted Nov 17, 2020·2 cites·8 claims
0241US2012291707A1Floating wafer track with lateral stabilization mechanismGRANNEMAN ERNST HENDRIK AUGUST·Filed 2010·Application pending·0 cites

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