Assignee
GRIMBERGEN MICHAEL
US·5 granted patents·3 pending applications·22 citations·filing 2006–2013
Top patents by PatentIndex Score
8 records- 0190US8158526B2Endpoint detection for photomask etchingGRIMBERGEN MICHAEL·Filed 2007·Granted Apr 17, 2012·11 cites·5 claims
- 0287US8092695B2Endpoint detection for photomask etchingGRIMBERGEN MICHAEL·Filed 2007·Granted Jan 10, 2012·9 cites·6 claims
- 0375US8956809B2Apparatus and methods for etching quartz substrate in photomask manufacturing applicationsGRIMBERGEN MICHAEL·Filed 2013·Granted Feb 17, 2015·2 cites·20 claims
- 0458US2007068456A1Monitoring processing of a substrate in a processing chamberGRIMBERGEN MICHAEL·Filed 2006·Application pending·0 cites
- 0552US8900469B2Etch rate detection for anti-reflective coating layer and absorber layer etchingGRIMBERGEN MICHAEL·Filed 2012·Granted Dec 2, 2014·0 cites·12 claims
- 0650US2008099436A1Endpoint detection for photomask etchingGRIMBERGEN MICHAEL·Filed 2007·Application pending·0 cites
- 0747US8808559B2Etch rate detection for reflective multi-material layers etchingGRIMBERGEN MICHAEL·Filed 2012·Granted Aug 19, 2014·0 cites·7 claims
- 0845US2008099435A1Endpoint detection for photomask etchingGRIMBERGEN MICHAEL·Filed 2007·Application pending·0 cites
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