Assignee
GRUNER TORALF
DE·3 granted patents·1 citations·filing 2009–2011
Top patents by PatentIndex Score
3 records- 0160US8305558B2Illumination system for a microlithography projection exposure apparatusGRUNER TORALF·Filed 2009·Granted Nov 6, 2012·1 cites·17 claims
- 0251US8767181B2Microlithographic exposure method as well as a projection exposure system for carrying out the methodGRUNER TORALF·Filed 2010·Granted Jul 1, 2014·0 cites·19 claims
- 0349US9046787B2Microlithographic projection exposure apparatusGRUNER TORALF·Filed 2011·Granted Jun 2, 2015·0 cites·23 claims
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