Assignee
HABETS BORIS
DE·4 granted patents·13 citations·filing 2008–2016
Top patents by PatentIndex Score
4 records- 0183US9543223B2Method and apparatus for fabricating wafer by calculating process correction parametersHABETS BORIS·Filed 2013·Granted Jan 10, 2017·5 cites·7 claims
- 0281US8440475B2Alignment calculationHABETS BORIS·Filed 2008·Granted May 14, 2013·7 cites·15 claims
- 0369US10295914B2Method and apparatus for fabricating wafer by calculating process correction parametersHABETS BORIS·Filed 2016·Granted May 21, 2019·1 cites·1 claims
- 0442US10379447B2Method and apparatus for simulation of lithography overlayHABETS BORIS·Filed 2013·Granted Aug 13, 2019·0 cites·9 claims
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