Assignee

HAN MAN HO

KR·1 granted patent·0 citations·filing 2013–2013

Technology mixC08F1 C08L1 C09D1 G03F1

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0138US8859194B2Polymer compound, and resist-protecting film composition including same for a liquid immersion exposure processHAN MAN HO·Filed 2013·Granted Oct 14, 2014·0 cites·21 claims

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