Assignee

HARA SHIGEHIRO

JP·1 granted patent·15 citations·filing 2010–2010

Technology mixB82Y1 G03F1 H01J1 H10P1

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0188US8207514B2Charged particle beam drawing apparatus and proximity effect correction method thereofHARA SHIGEHIRO·Filed 2010·Granted Jun 26, 2012·15 cites·10 claims

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