Assignee
HARADA KAZUHIRO
JP·7 granted patents·21 citations·filing 2009–2011
Top patents by PatentIndex Score
7 records- 0192US8529695B2Method for manufacturing a silicon waferHARADA KAZUHIRO·Filed 2011·Granted Sep 10, 2013·6 cites·1 claims
- 0285US8110491B2Method of manufacturing semiconductor device and substrate processing apparatusHARADA KAZUHIRO·Filed 2009·Granted Feb 7, 2012·10 cites·20 claims
- 0375US9218993B2Method of manufacturing semiconductor device and method of processing substrateHARADA KAZUHIRO·Filed 2011·Granted Dec 22, 2015·1 cites·14 claims
- 0467US8492258B2Method of manufacturing semiconductor device and substrate processing apparatusHARADA KAZUHIRO·Filed 2011·Granted Jul 23, 2013·2 cites·19 claims
- 0564US8728935B2Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatusHARADA KAZUHIRO·Filed 2010·Granted May 20, 2014·2 cites·8 claims
- 0658US8562739B2Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereofHARADA KAZUHIRO·Filed 2009·Granted Oct 22, 2013·0 cites·7 claims
- 0755US8951346B2Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereofHARADA KAZUHIRO·Filed 2009·Granted Feb 10, 2015·0 cites·10 claims
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