Assignee

HARTE KENNETH J

US·2 granted patents·18 citations·filing 2011–2011

Technology mixB23K2 G03F1 H10P1

Top patents by PatentIndex Score

2 records

0189US8658937B2Method and apparatus for processing substrate edgesHARTE KENNETH J·Filed 2011·Granted Feb 25, 2014·16 cites·80 claims
0273US8183500B2Orthogonal beam delivery system for wafer edge processingHARTE KENNETH J·Filed 2011·Granted May 22, 2012·2 cites·17 claims

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