Assignee
HATAKEYAMA JUN
JP·49 granted patents·5 pending applications·267 citations·filing 2006–2012
Top patents by PatentIndex Score
54 records- 0197US9360753B2Resist composition and patterning processHATAKEYAMA JUN·Filed 2012·Granted Jun 7, 2016·22 cites·8 claims
- 0297US8088554B2Bottom resist layer composition and patterning process using the sameHATAKEYAMA JUN·Filed 2010·Granted Jan 3, 2012·16 cites·2 claims
- 0396US8440386B2Patterning process, resist composition, and acetal compoundHATAKEYAMA JUN·Filed 2011·Granted May 14, 2013·10 cites·14 claims
- 0496US8057982B2Monomer, resist composition, and patterning processHATAKEYAMA JUN·Filed 2009·Granted Nov 15, 2011·33 cites·17 claims
- 0593US9017918B2Monomer, polymer, chemically amplified positive resist composition, and patterning processHATAKEYAMA JUN·Filed 2011·Granted Apr 28, 2015·8 cites·9 claims
- 0693US8921026B2Basic compound, chemically amplified resist composition, and patterning processHATAKEYAMA JUN·Filed 2011·Granted Dec 30, 2014·9 cites·9 claims
- 0793US8450048B2Method for forming resist underlayer film, patterning process using the same, and composition for the resist underlayer filmHATAKEYAMA JUN·Filed 2009·Granted May 28, 2013·13 cites·22 claims
- 0893US8426115B2Patterning process and resist compositionHATAKEYAMA JUN·Filed 2010·Granted Apr 23, 2013·9 cites·13 claims
- 0992US9164383B2Resist composition and patterning processHATAKEYAMA JUN·Filed 2012·Granted Oct 20, 2015·8 cites·8 claims
- 1092US8323872B2Resist protective coating material and patterning processHATAKEYAMA JUN·Filed 2006·Granted Dec 4, 2012·15 cites·7 claims
- 1191US8507175B2Patterning process and resist compositionHATAKEYAMA JUN·Filed 2010·Granted Aug 13, 2013·13 cites·21 claims
- 1291US8216774B2Patterning processHATAKEYAMA JUN·Filed 2010·Granted Jul 10, 2012·7 cites·30 claims
- 1391US8198016B2Patterning processHATAKEYAMA JUN·Filed 2009·Granted Jun 12, 2012·13 cites·17 claims
- 1488US8507173B2Patterning processHATAKEYAMA JUN·Filed 2009·Granted Aug 13, 2013·10 cites·14 claims
- 1587US8574817B2Positive resist composition and patterning processHATAKEYAMA JUN·Filed 2012·Granted Nov 5, 2013·5 cites·11 claims
- 1687US8105760B2Patterning process and pattern surface coating compositionHATAKEYAMA JUN·Filed 2008·Granted Jan 31, 2012·11 cites·7 claims
- 1784US8501384B2Positive resist composition and patterning processHATAKEYAMA JUN·Filed 2011·Granted Aug 6, 2013·4 cites·12 claims
- 1883US8450042B2Positive resist composition and patterning processHATAKEYAMA JUN·Filed 2010·Granted May 28, 2013·4 cites·20 claims
- 1983US8338078B2Photoresist undercoat-forming material and patterning processHATAKEYAMA JUN·Filed 2009·Granted Dec 25, 2012·6 cites·12 claims
- 2082US8129086B2Polymerizable compound, polymer, positive resist composition, and patterning process using the sameHATAKEYAMA JUN·Filed 2009·Granted Mar 6, 2012·6 cites·20 claims
- 2181US8841061B2Positive resist composition and patterning processHATAKEYAMA JUN·Filed 2012·Granted Sep 23, 2014·3 cites·11 claims
- 2281US8492078B2Patterning processHATAKEYAMA JUN·Filed 2011·Granted Jul 23, 2013·3 cites·20 claims
- 2381US8211618B2Positive resist composition and patterning processHATAKEYAMA JUN·Filed 2010·Granted Jul 3, 2012·3 cites·12 claims
- 2477US8735046B2Positive resist composition and patterning processHATAKEYAMA JUN·Filed 2011·Granted May 27, 2014·2 cites·10 claims
- 2577US8288072B2Resist lower layer film-formed substrateHATAKEYAMA JUN·Filed 2008·Granted Oct 16, 2012·4 cites·8 claims
- 2676US8703404B2Patterning processHATAKEYAMA JUN·Filed 2012·Granted Apr 22, 2014·2 cites·21 claims
- 2775US9029064B2Patterning process and resist compositionHATAKEYAMA JUN·Filed 2012·Granted May 12, 2015·2 cites·17 claims
- 2874US9091914B2Resist composition and patterning processHATAKEYAMA JUN·Filed 2012·Granted Jul 28, 2015·2 cites·7 claims
- 2974US8895231B2Patterning process and resist compositionHATAKEYAMA JUN·Filed 2011·Granted Nov 25, 2014·7 cites·17 claims
- 3073US8778592B2Positive resist composition and patterning processHATAKEYAMA JUN·Filed 2012·Granted Jul 15, 2014·3 cites·6 claims
- 3173US8741554B2Patterning process and resist compositionHATAKEYAMA JUN·Filed 2010·Granted Jun 3, 2014·2 cites·19 claims
- 3271US8617800B2Patterning processHATAKEYAMA JUN·Filed 2009·Granted Dec 31, 2013·3 cites·12 claims
- 3369US8088537B2Resist top coat composition and patterning processHATAKEYAMA JUN·Filed 2009·Granted Jan 3, 2012·2 cites·24 claims
- 3468US8623590B2Pattern forming processHATAKEYAMA JUN·Filed 2011·Granted Jan 7, 2014·2 cites·12 claims
- 3566US9316909B2Patterning processHATAKEYAMA JUN·Filed 2011·Granted Apr 19, 2016·1 cites·12 claims
- 3666US8999630B2Patterning process and resist compositionHATAKEYAMA JUN·Filed 2012·Granted Apr 7, 2015·1 cites·10 claims
- 3766US8828647B2Patterning process and resist compositionHATAKEYAMA JUN·Filed 2012·Granted Sep 9, 2014·1 cites·9 claims
- 3866US8105764B2Patterning processHATAKEYAMA JUN·Filed 2008·Granted Jan 31, 2012·2 cites·22 claims
- 3958US2009000322A1Control device and control method for air conditioning deviceHATAKEYAMA JUN·Filed 2008·Application pending·0 cites
- 4056US8753805B2Patterning process and resist compositionHATAKEYAMA JUN·Filed 2012·Granted Jun 17, 2014·0 cites·15 claims
- 4154US8652756B2Positive resist composition and patterning processHATAKEYAMA JUN·Filed 2012·Granted Feb 18, 2014·0 cites·19 claims
- 4254US8574816B2Positive resist composition and patterning processHATAKEYAMA JUN·Filed 2012·Granted Nov 5, 2013·0 cites·19 claims
- 4353US2012249995A1Resist protective film material and pattern formation methodHATAKEYAMA JUN·Filed 2012·Application pending·0 cites
- 4450US8790866B2Patterning process and resist compositionHATAKEYAMA JUN·Filed 2012·Granted Jul 29, 2014·0 cites·12 claims
- 4548US8808966B2Positive resist composition and patterning processHATAKEYAMA JUN·Filed 2012·Granted Aug 19, 2014·0 cites·11 claims
- 4647US8828641B2Chemically amplified resist composition and patterning processHATAKEYAMA JUN·Filed 2010·Granted Sep 9, 2014·0 cites·6 claims
- 4747US8741548B2Patterning processHATAKEYAMA JUN·Filed 2008·Granted Jun 3, 2014·0 cites·9 claims
- 4843US8865390B2Patterning process and resist compositionHATAKEYAMA JUN·Filed 2012·Granted Oct 21, 2014·0 cites·14 claims
- 4943US2013084527A1Positive resist composition and patterning processHATAKEYAMA JUN·Filed 2012·Application pending·0 cites
- 5042US8703408B2Patterning processHATAKEYAMA JUN·Filed 2011·Granted Apr 22, 2014·0 cites·10 claims
Showing the top 50 of 54 patent records by PatentIndex Score.
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