Assignee
HATAKEYAMA MASAHIRO
JP·6 granted patents·55 citations·filing 2008–2012
Top patents by PatentIndex Score
6 records- 0197US8497476B2Inspection deviceHATAKEYAMA MASAHIRO·Filed 2012·Granted Jul 30, 2013·42 cites·10 claims
- 0283US8076654B2Sample surface inspection apparatus and methodHATAKEYAMA MASAHIRO·Filed 2008·Granted Dec 13, 2011·5 cites·15 claims
- 0381US8937283B2Specimen observation method and device using secondary emission electron and mirror electron detectionHATAKEYAMA MASAHIRO·Filed 2009·Granted Jan 20, 2015·6 cites·6 claims
- 0473US8431892B2Detector and inspecting apparatusHATAKEYAMA MASAHIRO·Filed 2010·Granted Apr 30, 2013·2 cites·26 claims
- 0556US8674317B2Sample surface inspection apparatus and methodHATAKEYAMA MASAHIRO·Filed 2011·Granted Mar 18, 2014·0 cites·11 claims
- 0652US9074994B2Inspection method and apparatus of a glass substrate for imprintHATAKEYAMA MASAHIRO·Filed 2009·Granted Jul 7, 2015·0 cites·22 claims
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