Assignee
HAYASHI NOZOMU
JP·3 granted patents·2 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0166US8390809B2Exposure method, exposure apparatus, and method of manufacturing deviceHAYASHI NOZOMU·Filed 2009·Granted Mar 5, 2013·2 cites·18 claims
- 0248US8638370B2Apparatus and method of processing substrate containing mark and method of manufacturing deviceHAYASHI NOZOMU·Filed 2010·Granted Jan 28, 2014·0 cites·6 claims
- 0345US9261776B2Imprint apparatus, and method of manufacturing articleHAYASHI NOZOMU·Filed 2012·Granted Feb 16, 2016·0 cites·10 claims
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