Assignee
HEERTJES MARCEL FRANCOIS
NL·3 granted patents·4 citations·filing 2008–2012
Top patents by PatentIndex Score
3 records- 0164US8135488B2Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning deviceHEERTJES MARCEL FRANCOIS·Filed 2008·Granted Mar 13, 2012·2 cites·13 claims
- 0257US8675179B2Control system, lithographic apparatus and a method to control a position quantity of a control location of a movable objectHEERTJES MARCEL FRANCOIS·Filed 2010·Granted Mar 18, 2014·2 cites·24 claims
- 0353US8452442B2Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning deviceHEERTJES MARCEL FRANCOIS·Filed 2012·Granted May 28, 2013·0 cites·18 claims
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