Assignee
HEGDE HARIHARAKESHAVA SARPANGALA
US·0 granted patents·6 pending applications·0 citations·filing 2011–2016
Top patents by PatentIndex Score
6 records- 0147US2016260585A1Multi-grid assembly in plasma source system and methods for improving sameHEGDE HARIHARAKESHAVA SARPANGALA·Filed 2016·Application pending·0 cites
- 0246US2013015757A1Multi-grid assembly in plasma source system and methods for improving sameHEGDE HARIHARAKESHAVA SARPANGALA·Filed 2011·Application pending·0 cites
- 0344US2013014898A1Plasma breakers and methods thereforHEGDE HARIHARAKESHAVA SARPANGALA·Filed 2011·Application pending·0 cites
- 0444US2013014700A1Target shield designs in multi-target deposition system.HEGDE HARIHARAKESHAVA SARPANGALA·Filed 2011·Application pending·0 cites
- 0538US2014227460A1Methods for addressing inboard-outboard asymmetry in substrate processingHEGDE HARIHARAKESHAVA SARPANGALA·Filed 2013·Application pending·0 cites
- 0636US2013015055A1Dual plasma source systems and methods for reactive plasma depositionHEGDE HARIHARAKESHAVA SARPANGALA·Filed 2011·Application pending·0 cites
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