Assignee
HELLMA MATERIALS GMBH & CO KG
DE·6 granted patents·8 citations·filing 2005–2009
Top patents by PatentIndex Score
6 records- 0171US7883578B2Process for preparing CaF2 lens blanks especially for 193 nm and 157 nm lithography with minimized deffectsHELLMA MATERIALS GMBH & CO KG·Filed 2005·Granted Feb 8, 2011·3 cites·3 claims
- 0262US7837969B2Method of making large-volume CaF2 single crystals for optical elements with an optic axis parallel to the (100)-or (110)-crystal axis and CaF2 single crystal made therebyHELLMA MATERIALS GMBH & CO KG·Filed 2009·Granted Nov 23, 2010·3 cites·14 claims
- 0358US7822093B2Method and apparatus for changing the length of a laser pulseHELLMA MATERIALS GMBH & CO KG·Filed 2008·Granted Oct 26, 2010·2 cites·24 claims
- 0449US7825387B2Method for quantitative determination of the suitability of crystals for optical components exposed to high energy densities, crystals graded in this way and uses thereofHELLMA MATERIALS GMBH & CO KG·Filed 2006·Granted Nov 2, 2010·0 cites·8 claims
- 0545US7873084B2Arrangement and method for preventing the depolarization of linear-polarized light during the transmission of light through crystalsHELLMA MATERIALS GMBH & CO KG·Filed 2007·Granted Jan 18, 2011·0 cites·19 claims
- 0636US7968074B2Method for making low-stress large-volume crystals with reduced stress birefringence and more uniform refractive index and crystals made therebyHELLMA MATERIALS GMBH & CO KG·Filed 2005·Granted Jun 28, 2011·0 cites·22 claims
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