Assignee

HENCH JOHN

US·1 granted patent·38 citations·filing 2007–2007

Technology mixG01B1 G01N1 G06F1 H10P1

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0191US8798966B1Measuring critical dimensions of a semiconductor structureHENCH JOHN·Filed 2007·Granted Aug 5, 2014·38 cites·35 claims

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