Assignee

HENDRICKSON SCOTT A

US·1 granted patent·3 citations·filing 2012–2012

Technology mixH05B1 H10P1 H10W1

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0168US8841629B2Microwave excursion detection for semiconductor processingHENDRICKSON SCOTT A·Filed 2012·Granted Sep 23, 2014·3 cites·17 claims

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