Assignee
HENDRICKX ERIC HENRI JAN
BE·1 granted patent·1 pending application·1 citations·filing 2009–2011
Technology mixG03F2
Top patents by PatentIndex Score
2 records- 0159US8510686B2Inverse lithography for high transmission attenuated phase shift mask design and creationHENDRICKX ERIC HENRI JAN·Filed 2011·Granted Aug 13, 2013·1 cites·21 claims
- 0245US2010216061A1Inverse Lithography For High Transmission Attenuated Phase Shift Mask Design And CreationHENDRICKX ERIC HENRI JAN·Filed 2009·Application pending·0 cites
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