Assignee
HEO JIN-SEOK
KR·9 granted patents·1 pending application·17 citations·filing 2010–2015
Top patents by PatentIndex Score
10 records- 0186US8930011B2Method of measuring an overlay of an objectHEO JIN-SEOK·Filed 2011·Granted Jan 6, 2015·5 cites·17 claims
- 0282US8492058B2Photolithography method including technique of determining distribution of energy of exposure light passing through slit of exposure apparatusHEO JIN-SEOK·Filed 2012·Granted Jul 23, 2013·3 cites·20 claims
- 0380US8129997B2Battery cell voltage measuring apparatus and methodHEO JIN-SEOK·Filed 2010·Granted Mar 6, 2012·5 cites·22 claims
- 0472US8794377B2Silencer for reducing acoustic noise of fuel cell systemHEO JIN-SEOK·Filed 2012·Granted Aug 5, 2014·1 cites·9 claims
- 0569US8338063B2Photolithography method including technique of determining distribution of energy of exposure light passing through slit of exposure apparatusHEO JIN-SEOK·Filed 2012·Granted Dec 25, 2012·1 cites·20 claims
- 0664US9544985B2Apparatus and system for generating extreme ultraviolet light and method of using the sameHEO JIN-SEOK·Filed 2015·Granted Jan 10, 2017·1 cites·20 claims
- 0757US8860421B2Cell voltage measuring apparatus and method of battery pack having multiplexers to output voltage signal of each cellHEO JIN-SEOK·Filed 2011·Granted Oct 14, 2014·1 cites·20 claims
- 0855US9256124B2Apparatus for manufacturing a maskHEO JIN-SEOK·Filed 2012·Granted Feb 9, 2016·0 cites·16 claims
- 0948US8599360B2Reflective reticle chuck, reflective illumination system including the same, method of controlling flatness of reflective reticle using the chuck, and method of manufacturing semiconductor device using the chuckHEO JIN-SEOK·Filed 2010·Granted Dec 3, 2013·0 cites·11 claims
- 1037US2011116705A1Method of measuring focal variations of a photolithography apparatus and a method of fabricating a semiconductor device using the focal variations measuring methodHEO JIN-SEOK·Filed 2010·Application pending·0 cites
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