Assignee
HIA INC
US·2 granted patents·2 pending applications·1 citations·filing 2016–2018
Top patents by PatentIndex Score
4 records- 0170US11456162B2Multifocal magnetron design for physical vapor deposition processing on a single cathodeHIA INC·Filed 2018·Granted Sep 27, 2022·1 cites·2 claims
- 0248US2019043701A1Inverted magnetron for processing of thin film materialsHIA INC·Filed 2018·Application pending·0 cites
- 0344US2018005806A1Apparatus for physical vapor deposition reactive processing of thin film materialsHIA INC·Filed 2017·Application pending·0 cites
- 0438US9911583B1Apparatus for enhanced physical vapor depositionHIA INC·Filed 2016·Granted Mar 6, 2018·0 cites·20 claims
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