Assignee
HIGH YIELD TECHNOLOGY
US·25 granted patents·643 citations·filing 1986–1995
Top patents by PatentIndex Score
25 records- 0194US5424558AApparatus and a method for dynamically tuning a particle sensor in response to varying process conditionsHIGH YIELD TECHNOLOGY·Filed 1993·Granted Jun 13, 1995·96 cites·34 claims
- 0290US4739177ALight scattering particle detector for wafer processing equipmentHIGH YIELD TECHNOLOGY·Filed 1986·Granted Apr 19, 1988·73 cites·20 claims
- 0386US5132548AHigh sensitivity, large detection area particle sensor for vacuum applicationsHIGH YIELD TECHNOLOGY·Filed 1990·Granted Jul 21, 1992·75 cites·8 claims
- 0477US4783599AParticle detector for flowing liquids with the ability to distinguish bubbles via photodiodes disposed 180° apartHIGH YIELD TECHNOLOGY·Filed 1987·Granted Nov 8, 1988·37 cites·11 claims
- 0572US5347138AIn situ real time particle monitor for a sputter coater chamberHIGH YIELD TECHNOLOGY·Filed 1993·Granted Sep 13, 1994·35 cites·18 claims
- 0666US5637881AMethod to detect non-spherical particles using orthogonally polarized lightHIGH YIELD TECHNOLOGY·Filed 1995·Granted Jun 10, 1997·32 cites·10 claims
- 0766US5436465AModular particle monitor for vacuum process equipmentHIGH YIELD TECHNOLOGY·Filed 1993·Granted Jul 25, 1995·31 cites·16 claims
- 0866US5266798AHigh sensitivity, large detection area particle sensor for vacuum applicationsHIGH YIELD TECHNOLOGY·Filed 1991·Granted Nov 30, 1993·31 cites·7 claims
- 0966US4896048AScattering-type particle detection device for use in high temperature process chambersHIGH YIELD TECHNOLOGY·Filed 1988·Granted Jan 23, 1990·23 cites·36 claims
- 1066US4804853ACompact particle flux monitorHIGH YIELD TECHNOLOGY·Filed 1987·Granted Feb 14, 1989·28 cites·16 claims
- 1160US4792199ASystem for detection of extremely small particles in a low pressure environmentHIGH YIELD TECHNOLOGY·Filed 1987·Granted Dec 20, 1988·19 cites·8 claims
- 1258US5360980AStructure and method for providing a gas purge for a vacuum particle sensor installed in a corrosive or coating environmentHIGH YIELD TECHNOLOGY·Filed 1993·Granted Nov 1, 1994·25 cites·10 claims
- 1358US4894529AReal-time particle counter for liquids with nebulizer and dryerHIGH YIELD TECHNOLOGY·Filed 1988·Granted Jan 16, 1990·19 cites·11 claims
- 1454US4812664AApparatus for scanning a flat surface to detect defectsHIGH YIELD TECHNOLOGY·Filed 1987·Granted Mar 14, 1989·15 cites·10 claims
- 1552US5055698AReal-time particle sensor for disk drivesHIGH YIELD TECHNOLOGY·Filed 1990·Granted Oct 8, 1991·8 cites·12 claims
- 1652US4825094AReal time particle fallout monitor with tubular structureHIGH YIELD TECHNOLOGY·Filed 1988·Granted Apr 25, 1989·15 cites·9 claims
- 1750US5534706AParticle monitor for throttled pumping systemsHIGH YIELD TECHNOLOGY·Filed 1994·Granted Jul 9, 1996·17 cites·12 claims
- 1850US5235625AMethod for synchronizing particle counters to external eventsHIGH YIELD TECHNOLOGY·Filed 1992·Granted Aug 10, 1993·16 cites·8 claims
- 1949US5212580ALow cost stage for raster scanning of semiconductor wafersHIGH YIELD TECHNOLOGY·Filed 1992·Granted May 18, 1993·10 cites·18 claims
- 2044US5606418AQuasi bright field particle sensorHIGH YIELD TECHNOLOGY·Filed 1995·Granted Feb 25, 1997·10 cites·18 claims
- 2144US5247188AConcentrator funnel for vacuum line particle monitorsHIGH YIELD TECHNOLOGY·Filed 1992·Granted Sep 21, 1993·10 cites·10 claims
- 2238US5773841ASelf aligning vacuum seal assemblyHIGH YIELD TECHNOLOGY·Filed 1995·Granted Jun 30, 1998·7 cites·9 claims
- 2334US5157678ALaser safe housing for a particle monitor in vacuum pump linesHIGH YIELD TECHNOLOGY·Filed 1991·Granted Oct 20, 1992·4 cites·12 claims
- 2430US5406830AParticle monitor for loadlock soft pump linesHIGH YIELD TECHNOLOGY·Filed 1993·Granted Apr 18, 1995·6 cites·12 claims
- 2530US4967075AVelocity monitoring method and apparatusHIGH YIELD TECHNOLOGY·Filed 1988·Granted Oct 30, 1990·1 cites·7 claims
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