Assignee
HITACHI KENKI FINE TECH CO LTD
JP·4 granted patents·24 citations·filing 2004–2005
Top patents by PatentIndex Score
4 records- 0179US7498589B2Scanning probe microscopeHITACHI KENKI FINE TECH CO LTD·Filed 2005·Granted Mar 3, 2009·8 cites·10 claims
- 0255US7243441B2Method and apparatus for measuring depth of holes formed on a specimenHITACHI KENKI FINE TECH CO LTD·Filed 2004·Granted Jul 17, 2007·8 cites·4 claims
- 0346US7388199B2Probe manufacturing method, probe, and scanning probe microscopeHITACHI KENKI FINE TECH CO LTD·Filed 2004·Granted Jun 17, 2008·5 cites·17 claims
- 0443US7350404B2Scanning type probe microscope and probe moving control method thereforHITACHI KENKI FINE TECH CO LTD·Filed 2004·Granted Apr 1, 2008·3 cites·4 claims
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