Assignee
HITACHI KOKUSAI ELECTRIC IN
JP·1 granted patent·1 pending application·25 citations·filing 2004–2009
Top patents by PatentIndex Score
2 records- 0183US7534730B2Producing method of semiconductor device and substrate processing apparatusHITACHI KOKUSAI ELECTRIC IN·Filed 2004·Granted May 19, 2009·25 cites·27 claims
- 0243US2009233430A1Semiconductor device manufacturing method, semiconductor device manufacturing apparatus, and semiconductor device manufacturing systemHITACHI KOKUSAI ELECTRIC IN·Filed 2009·Application pending·0 cites
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