Assignee
HITACHI KOKUSAI ELECTRONIC INC
JP·0 granted patents·2 pending applications·0 citations·filing 2003–2004
Top patents by PatentIndex Score
2 records- 0142US2006035470A1Method for manufaturing semiconductor device and substrate processing systemHITACHI KOKUSAI ELECTRONIC INC·Filed 2003·Application pending·0 cites
- 0239US2006151117A1Semiconductor producing device and semiconductor producing methodHITACHI KOKUSAI ELECTRONIC INC·Filed 2004·Application pending·0 cites
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