Assignee

HOF ALBRECHT

DE·2 granted patents·1 citations·filing 2007–2012

Technology mixG03F2 G01B1 G01M1 G02B1

Top patents by PatentIndex Score

2 records

0154US8654345B2Optical system, in particular in a microlithographic projection exposure apparatusHOF ALBRECHT·Filed 2012·Granted Feb 18, 2014·1 cites·20 claims
0236US8253947B2Device and method for measuring lithography masksHOF ALBRECHT·Filed 2007·Granted Aug 28, 2012·0 cites·17 claims

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