Assignee
HOGLE RICHARD ALLEN
0 granted patents·2 pending applications·0 citations·filing 2007–2009
Top patents by PatentIndex Score
2 records- 0156US2011041872A1Rapid supply of fluorine source gas to remote plasma for chamber cleaningHOGLE RICHARD ALLEN·Filed 2009·Application pending·0 cites
- 0247US2009068086A1Method and apparatus for the production of high purity tungsten hexafluorideHOGLE RICHARD ALLEN·Filed 2007·Application pending·0 cites
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