Assignee
HOL SVEN ANTOIN JOHAN
NL·5 granted patents·5 citations·filing 2010–2012
Top patents by PatentIndex Score
5 records- 0172US9081307B2Variable reluctance device, stage apparatus, lithographic apparatus and device manufacturing methodHOL SVEN ANTOIN JOHAN·Filed 2011·Granted Jul 14, 2015·3 cites·13 claims
- 0267US8896811B2Positioning system and a method for positioning a substage with respect to a frameHOL SVEN ANTOIN JOHAN·Filed 2010·Granted Nov 25, 2014·2 cites·20 claims
- 0343US8687171B2Electromagnetic actuator, stage apparatus and lithographic apparatusHOL SVEN ANTOIN JOHAN·Filed 2012·Granted Apr 1, 2014·0 cites·15 claims
- 0440US9172294B2Planar motor and lithographic apparatus comprising such planar motorHOL SVEN ANTOIN JOHAN·Filed 2012·Granted Oct 27, 2015·0 cites·19 claims
- 0540US8472010B2Actuator, positioning system and lithographic apparatusHOL SVEN ANTOIN JOHAN·Filed 2010·Granted Jun 25, 2013·0 cites·9 claims
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