Assignee
HOLLAND JOHN PATRICK
US·4 granted patents·3 pending applications·76 citations·filing 2011–2012
Top patents by PatentIndex Score
7 records- 0196US8900402B2Semiconductor processing system having multiple decoupled plasma sourcesHOLLAND JOHN PATRICK·Filed 2011·Granted Dec 2, 2014·38 cites·20 claims
- 0294US9177756B2E-beam enhanced decoupled source for semiconductor processingHOLLAND JOHN PATRICK·Filed 2012·Granted Nov 3, 2015·23 cites·19 claims
- 0388US8900403B2Semiconductor processing system having multiple decoupled plasma sourcesHOLLAND JOHN PATRICK·Filed 2011·Granted Dec 2, 2014·7 cites·19 claims
- 0487US9111728B2E-beam enhanced decoupled source for semiconductor processingHOLLAND JOHN PATRICK·Filed 2012·Granted Aug 18, 2015·8 cites·20 claims
- 0541US2012258607A1E-Beam Enhanced Decoupled Source for Semiconductor ProcessingHOLLAND JOHN PATRICK·Filed 2012·Application pending·0 cites
- 0641US2012255678A1Multi-Frequency Hollow Cathode System for Substrate Plasma ProcessingHOLLAND JOHN PATRICK·Filed 2011·Application pending·0 cites
- 0740US2012258555A1Multi-Frequency Hollow Cathode and Systems Implementing the SameHOLLAND JOHN PATRICK·Filed 2011·Application pending·0 cites
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